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1 Ergebnisse
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A novel solution to improve static and dynamic retention ch..:
Lee, Jieun
;
Jang, Dongkyu
;
Kim, Sangho
...
Japanese Journal of Applied Physics. 63 (2024) 3 - p. 03SP78 , 2024
Link:
https://doi.org/10.35848/1347-4065/ad2030
RT Journal T1
A novel solution to improve static and dynamic retention characteristics by enhancing hydrogen passivation with in situ LD-TEOS/TEOS dual layer
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ad2030&Exemplar=1&LAN=DE A1 Lee, Jieun A1 Jang, Dongkyu A1 Kim, Sangho A1 Kim, Shindeuk A1 Park, Taehoon A1 Hong, Hyeongsun PB IOP Publishing YR 2024 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 63 IS 3 SP 03SP78 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ad2030 DO https://doi.org/10.35848/1347-4065/ad2030 SF ELIB - SuUB Bremen
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