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1 Ergebnisse
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Effects of crystallinity of silicon channels formed by two ..:
Matsuo, Haruki
;
Yamashita, Hiroki
;
Shimada, Yusuke
...
Japanese Journal of Applied Physics. 63 (2024) 4 - p. 04SP19 , 2024
Link:
https://doi.org/10.35848/1347-4065/ad27bf
RT Journal T1
Effects of crystallinity of silicon channels formed by two metal-induced lateral crystallization methods on the cell current distribution in NAND-type 3D flash memory
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ad27bf&Exemplar=1&LAN=DE A1 Matsuo, Haruki A1 Yamashita, Hiroki A1 Shimada, Yusuke A1 Ishihara, Noritaka A1 Seto, Satoshi A1 Morita, Sho A1 Ukishima, Masafumi A1 Arayashiki, Yusuke A1 Kajiwara, Suzuka A1 Murayama, Akiyuki A1 Nishiyama, Katsuya A1 Sugimae, Kikuko A1 Mori, Shinji A1 Saito, Yuta A1 Shundo, Takeshi A1 Kanno, Yurika A1 Kamiya, Hiroyuki A1 Uchiyama, Yasuhiro A1 Aisou, Fumiki A1 Sekine, Katsuyuki A1 Ohtani, Norio PB IOP Publishing YR 2024 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 63 IS 4 SP 04SP19 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ad27bf DO https://doi.org/10.35848/1347-4065/ad27bf SF ELIB - SuUB Bremen
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