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1 Ergebnisse
1
7.4 nm linewidth Pt nanowires by electron-beam lithography ..:
Toyama, Ryo
;
Majima, Yutaka
Japanese Journal of Applied Physics. 63 (2024) 4 - p. 040905 , 2024
Link:
https://doi.org/10.35848/1347-4065/ad369e
RT Journal T1
7.4 nm linewidth Pt nanowires by electron-beam lithography using non-chemically amplified positive-tone resist and post-exposure bake
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ad369e&Exemplar=1&LAN=DE A1 Toyama, Ryo A1 Majima, Yutaka PB IOP Publishing YR 2024 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 63 IS 4 SP 040905 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ad369e DO https://doi.org/10.35848/1347-4065/ad369e SF ELIB - SuUB Bremen
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