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1 Ergebnisse
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CMP characteristics of IGZO thin film with a variety of pro..:
Wang, Wei
;
Zeng, Ming
;
Tian, Chao
...
Japanese Journal of Applied Physics. 63 (2024) 6 - p. 06SP06 , 2024
Link:
https://doi.org/10.35848/1347-4065/ad4bf0
RT Journal T1 <Title>CMP characteristics of IGZO thin film with a variety of process parameters</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ad4bf0&Exemplar=1&LAN=DE A1 Wang, Wei A1 Zeng, Ming A1 Tian, Chao A1 Sun, Hongbo A1 Cui, Kai A1 Wang, Guilei A1 Zhao, Chao PB IOP Publishing YR 2024 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 63 IS 6 SP 06SP06 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ad4bf0 DO https://doi.org/10.35848/1347-4065/ad4bf0 SF ELIB - SuUB Bremen
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