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1 Ergebnisse
1
Room temperature nanoimprint aided by electron beam irradia..:
Yasui, Manabu
;
Nishi, Yoshitake
;
Kurouchi, Masahito
..
Japanese Journal of Applied Physics. 63 (2024) 10 - p. 10SP04 , 2024
Link:
https://doi.org/10.35848/1347-4065/ad7963
RT Journal T1 <Title>Room temperature nanoimprint aided by electron beam irradiation for polysilsesquioxane</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ad7963&Exemplar=1&LAN=DE A1 Yasui, Manabu A1 Nishi, Yoshitake A1 Kurouchi, Masahito A1 Kaneko, Satoru A1 Mitsuhashi, Masahiko PB IOP Publishing YR 2024 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 63 IS 10 SP 10SP04 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ad7963 DO https://doi.org/10.35848/1347-4065/ad7963 SF ELIB - SuUB Bremen
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