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1 Ergebnisse
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Dependence of dose rate on the sensitivity of the resist un..:
Okamoto, Kazumasa
;
Kawai, Shunpei
;
Ikari, Yuta
...
Applied Physics Express. 14 (2021) 6 - p. 066502 , 2021
Link:
https://doi.org/10.35848/1882-0786/abfca3
RT Journal T1
Dependence of dose rate on the sensitivity of the resist under ultra-high flux extreme ultraviolet (EUV) pulse irradiation
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1882-0786_abfca3&Exemplar=1&LAN=DE A1 Okamoto, Kazumasa A1 Kawai, Shunpei A1 Ikari, Yuta A1 Hori, Shigeo A1 Konda, Akihiro A1 Ueno, Koki A1 Arai, Yohei A1 Ishino, Masahiko A1 Dinh, Thanh-Hung A1 Nishikino, Masaharu A1 Kon, Akira A1 Owada, Shigeki A1 Inubushi, Yuichi A1 Kinoshita, Hiroo A1 Kozawa, Takahiro PB IOP Publishing YR 2021 SN 1882-0778 SN 1882-0786 JF Applied Physics Express VO 14 IS 6 SP 066502 LK http://dx.doi.org/https://doi.org/10.35848/1882-0786/abfca3 DO https://doi.org/10.35848/1882-0786/abfca3 SF ELIB - SuUB Bremen
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