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1 Ergebnisse
1
Gate CD Control for memory Chip using Total Process Proximi..:
Nam, Byung-Ho
;
Lee, Hyung-J.
Journal of the Optical Society of Korea. 6 (2002) 4 - p. 180-184 , 2002
Link:
https://doi.org/10.3807/josk.2002.6.4.180
RT Journal T1 <Title>Gate CD Control for memory Chip using Total Process Proximity Based Correction Method</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3807_josk.2002.6.4.180&Exemplar=1&LAN=DE A1 Nam, Byung-Ho A1 Lee, Hyung-J. PB Korean Journal of Optics and Photonics YR 2002 SN 1226-4776 JF Journal of the Optical Society of Korea VO 6 IS 4 SP 180 OP 184 LK http://dx.doi.org/https://doi.org/10.3807/josk.2002.6.4.180 DO https://doi.org/10.3807/josk.2002.6.4.180 SF ELIB - SuUB Bremen
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