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Diffusion barrier properties of atomic-layer-deposited irid..:
Song, Sang In
;
Choi, Bum Ho
;
Lee, Jong Ho
.
Journal of the Korean Physical Society. 60 (2012) 10 - p. 1521-1525 , 2012
Link:
https://doi.org/10.3938/jkps.60.1521
RT Journal T1 <Title>Diffusion barrier properties of atomic-layer-deposited iridium thin films on Cu/Ir/Si structures</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3938_jkps.60.1521&Exemplar=1&LAN=DE A1 Song, Sang In A1 Choi, Bum Ho A1 Lee, Jong Ho A1 Lee, Hong Kee PB Korean Physical Society YR 2012 SN 0374-4884 SN 1976-8524 JF Journal of the Korean Physical Society VO 60 IS 10 SP 1521 OP 1525 LK http://dx.doi.org/https://doi.org/10.3938/jkps.60.1521 DO https://doi.org/10.3938/jkps.60.1521 SF ELIB - SuUB Bremen
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