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Temperature behavior of pellicles in extreme ultraviolet li..:
Lee, Hyung-Cheol
;
Kim, Eun-Jin
;
Kim, Ji-Won
.
Journal of the Korean Physical Society. 61 (2012) 7 - p. 1093-1096 , 2012
Link:
https://doi.org/10.3938/jkps.61.1093
RT Journal T1 <Title>Temperature behavior of pellicles in extreme ultraviolet lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3938_jkps.61.1093&Exemplar=1&LAN=DE A1 Lee, Hyung-Cheol A1 Kim, Eun-Jin A1 Kim, Ji-Won A1 Oh, Hye-Keun PB Korean Physical Society YR 2012 SN 0374-4884 SN 1976-8524 JF Journal of the Korean Physical Society VO 61 IS 7 SP 1093 OP 1096 LK http://dx.doi.org/https://doi.org/10.3938/jkps.61.1093 DO https://doi.org/10.3938/jkps.61.1093 SF ELIB - SuUB Bremen
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