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1 Ergebnisse
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Design and fabrication of a scanning electron microscope (S..:
Chung, Bo-Hyun
;
Kim, Seung Jae
;
Choi, Min Sik
.
Journal of the Korean Physical Society. 63 (2013) 7 - p. 1287-1290 , 2013
Link:
https://doi.org/10.3938/jkps.63.1287
RT Journal T1 <Title>Design and fabrication of a scanning electron microscope (SEM) with an electrostatic column for process embedment</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3938_jkps.63.1287&Exemplar=1&LAN=DE A1 Chung, Bo-Hyun A1 Kim, Seung Jae A1 Choi, Min Sik A1 Jang, Dong Young PB Korean Physical Society YR 2013 SN 0374-4884 SN 1976-8524 JF Journal of the Korean Physical Society VO 63 IS 7 SP 1287 OP 1290 LK http://dx.doi.org/https://doi.org/10.3938/jkps.63.1287 DO https://doi.org/10.3938/jkps.63.1287 SF ELIB - SuUB Bremen
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