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1 Ergebnisse
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Monitoring of Film Qualities of Amorphous SiO2 films/Si(100..:
Hong, Jung-Taek
;
Lee, Byoung Wan
;
Oh, Soo Han
...
Journal of the Korean Physical Society. 73 (2018) 7 - p. 960-964 , 2018
Link:
https://doi.org/10.3938/jkps.73.960
RT Journal T1
Monitoring of Film Qualities of Amorphous SiO2 films/Si(100) Substrates by Measuring Bulk and Surface Acoustic Waves in Terms of Brillouin Spectroscopy
UL https://suche.suub.uni-bremen.de/peid=cr-10.3938_jkps.73.960&Exemplar=1&LAN=DE A1 Hong, Jung-Taek A1 Lee, Byoung Wan A1 Oh, Soo Han A1 Ko, Jae-Hyeon A1 Lee, Hunyong A1 Lee, Chulhwa A1 Kim, Doosung PB Korean Physical Society YR 2018 SN 0374-4884 SN 1976-8524 JF Journal of the Korean Physical Society VO 73 IS 7 SP 960 OP 964 LK http://dx.doi.org/https://doi.org/10.3938/jkps.73.960 DO https://doi.org/10.3938/jkps.73.960 SF ELIB - SuUB Bremen
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