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Study on the Oxidant Effect for Nitrogen Trifluoride Abatem..:
Kim, Ji Hun
;
Cho, Chang Hyun
Journal of the Korean Physical Society. 76 (2020) 10 - p. 895-898 , 2020
Link:
https://doi.org/10.3938/jkps.76.895
RT Journal T1 <Title>Study on the Oxidant Effect for Nitrogen Trifluoride Abatement by Using a 2.45 GHz Microwave Plasma Torch</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3938_jkps.76.895&Exemplar=1&LAN=DE A1 Kim, Ji Hun A1 Cho, Chang Hyun PB Korean Physical Society YR 2020 SN 0374-4884 SN 1976-8524 JF Journal of the Korean Physical Society VO 76 IS 10 SP 895 OP 898 LK http://dx.doi.org/https://doi.org/10.3938/jkps.76.895 DO https://doi.org/10.3938/jkps.76.895 SF ELIB - SuUB Bremen
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