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Thin Coating Deposition by Magnetron Sputtering:

, In: Production, Properties, and Applications of High Temperature Coatings; Advances in Chemical and Materials Engineering,
Odetola, Peter Ifeolu ; Popoola, Patricia A. P. ; Oladijo, Philip - p. 403-428 , 2018
Link: https://doi.org/10.4018/978-1-5225-4194-3.ch015