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1 Ergebnisse
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Highest Quality and Repeatability for Single Wafer 150mm Si..:
Yu, Sean
;
Hu, Jian Jun
;
Xu, Long Long
...
Materials Science Forum. 1062 (2022) - p. 229-234 , 2022
Link:
https://doi.org/10.4028/p-a66637
RT Journal T1
Highest Quality and Repeatability for Single Wafer 150mm SiC CMP Designed for High Volume Manufacturing
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_p-a66637&Exemplar=1&LAN=DE A1 Yu, Sean A1 Hu, Jian Jun A1 Xu, Long Long A1 Liu, Mike A1 Liu, Eulia A1 Givens, John A1 Leighton, Jamie PB Trans Tech Publications, Ltd. YR 2022 SN 1662-9752 JF Materials Science Forum VO 1062 SP 229 OP 234 LK http://dx.doi.org/https://doi.org/10.4028/p-a66637 DO https://doi.org/10.4028/p-a66637 SF ELIB - SuUB Bremen
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