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1 Ergebnisse
1
Investigation of Effects of Sulfuric Acid in Single Wafer C..:
Oh, Seung Jun
;
Song, Si Nae
;
Jeon, Jong Yeong
..
Solid State Phenomena. 346 (2023) - p. 189-194 , 2023
Link:
https://doi.org/10.4028/p-ap4i9r
RT Journal T1
Investigation of Effects of Sulfuric Acid in Single Wafer Cleaning Process Using Isopropyl Alcohol
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_p-ap4i9r&Exemplar=1&LAN=DE A1 Oh, Seung Jun A1 Song, Si Nae A1 Jeon, Jong Yeong A1 Lee, Sun Young A1 Kim, Tae Sung PB Trans Tech Publications, Ltd. YR 2023 SN 1662-9779 JF Solid State Phenomena VO 346 SP 189 OP 194 LK http://dx.doi.org/https://doi.org/10.4028/p-ap4i9r DO https://doi.org/10.4028/p-ap4i9r SF ELIB - SuUB Bremen
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