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1 Ergebnisse
1
Evaluation and Optimization of Particle Removal with a Resi..:
Mercadier, Thomas
;
Garnier, Philippe
;
Loup, Virginie
...
Solid State Phenomena. 346 (2023) - p. 268-274 , 2023
Link:
https://doi.org/10.4028/p-art4vs
RT Journal T1
Evaluation and Optimization of Particle Removal with a Resist Peeling Method
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_p-art4vs&Exemplar=1&LAN=DE A1 Mercadier, Thomas A1 Garnier, Philippe A1 Loup, Virginie A1 Tiron, Raluca A1 Zhang, Song A1 Higuchi, Ayumi A1 Belmiloud, Naser PB Trans Tech Publications, Ltd. YR 2023 SN 1662-9779 JF Solid State Phenomena VO 346 SP 268 OP 274 LK http://dx.doi.org/https://doi.org/10.4028/p-art4vs DO https://doi.org/10.4028/p-art4vs SF ELIB - SuUB Bremen
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