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1 Ergebnisse
1
Prediction of Wafer Handling-Induced Point Defects in 300 m..:
Hu, Hao
;
Lai, Xin
;
Chao, Ming Ming
.
Solid State Phenomena. 345 (2023) - p. 181-191 , 2023
Link:
https://doi.org/10.4028/p-blt8mu
RT Journal T1
Prediction of Wafer Handling-Induced Point Defects in 300 mm Silicon Wafer Manufacturing from Edge Geometric Data
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_p-blt8mu&Exemplar=1&LAN=DE A1 Hu, Hao A1 Lai, Xin A1 Chao, Ming Ming A1 Ullakko, Kari PB Trans Tech Publications, Ltd. YR 2023 SN 1662-9779 JF Solid State Phenomena VO 345 SP 181 OP 191 LK http://dx.doi.org/https://doi.org/10.4028/p-blt8mu DO https://doi.org/10.4028/p-blt8mu SF ELIB - SuUB Bremen
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