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1 Ergebnisse
1
Fine Edge and Bevel Film Cut Accuracy by a Novel and High P..:
Chen, Fu Ping
;
Zhang, Wei
;
Jia, Fu Jin
...
Solid State Phenomena. 346 (2023) - p. 222-227 , 2023
Link:
https://doi.org/10.4028/p-mj84mu
RT Journal T1
Fine Edge and Bevel Film Cut Accuracy by a Novel and High Precision Wafer Centering System
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_p-mj84mu&Exemplar=1&LAN=DE A1 Chen, Fu Ping A1 Zhang, Wei A1 Jia, Fu Jin A1 Wu, Kai Xuan A1 Wang, Wen Jun A1 Zhang, Xiao Yan A1 Wang, David H. A1 Wang, Jian A1 Wang, Jane A1 Han, Harry A1 Henry, Sally Ann A1 Jia, She Na PB Trans Tech Publications, Ltd. YR 2023 SN 1662-9779 JF Solid State Phenomena VO 346 SP 222 OP 227 LK http://dx.doi.org/https://doi.org/10.4028/p-mj84mu DO https://doi.org/10.4028/p-mj84mu SF ELIB - SuUB Bremen
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