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1 Ergebnisse
1
Study on Optimization of CMP Slurry for Tantalum in ULSI Ba..:
Mu, Hui Lai
;
Wang, Sheng Li
;
Li, Zhen Xia
..
Advanced Materials Research. 129-131 (2010) - p. 794-798 , 2010
Link:
https://doi.org/10.4028/www.scientific.net/amr.129-131..
RT Journal T1
Study on Optimization of CMP Slurry for Tantalum in ULSI Based on Taguchi Method
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_amr.129-131.794&Exemplar=1&LAN=DE A1 Mu, Hui Lai A1 Wang, Sheng Li A1 Li, Zhen Xia A1 Xu, Wen Zhong A1 Xiang, Xia PB Trans Tech Publications, Ltd. YR 2010 SN 1662-8985 JF Advanced Materials Research VO 129-131 SP 794 OP 798 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/amr.129-131.794 DO https://doi.org/10.4028/www.scientific.net/amr.129-131.794 SF ELIB - SuUB Bremen
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