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1 Ergebnisse
1
Pre-Growth Treatment of 4H-SiC Substrates by Hydrogen Etchi..:
Masahara, Koh
;
Ishida, Yuuki
;
Okumura, Hajime
...
Materials Science Forum. 338-342 (2000) - p. 1037-1040 , 2000
Link:
https://doi.org/10.4028/www.scientific.net/msf.338-342..
RT Journal T1
Pre-Growth Treatment of 4H-SiC Substrates by Hydrogen Etching at Low Pressure
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.338-342.1037&Exemplar=1&LAN=DE A1 Masahara, Koh A1 Ishida, Yuuki A1 Okumura, Hajime A1 Takahashi, Tetsuo A1 Kushibe, Mitsuhiro A1 Ohno, Takaya A1 Suzuki, Takahito A1 Tanaka, Tomoyuki A1 Yoshida, Sadafumi A1 Arai, Kazuo PB Trans Tech Publications, Ltd. YR 2000 SN 1662-9752 JF Materials Science Forum VO 338-342 SP 1037 OP 1040 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.338-342.1037 DO https://doi.org/10.4028/www.scientific.net/msf.338-342.1037 SF ELIB - SuUB Bremen
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