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1 Ergebnisse
1
Determination of Residual Resist Layer Thickness in E-Beam ..:
Lee, Yung Chun
;
Chiu, Cheng Yu
;
Liu, Chuan Pu
..
Materials Science Forum. 505-507 (2006) - p. 43-48 , 2006
Link:
https://doi.org/10.4028/www.scientific.net/msf.505-507..
RT Journal T1
Determination of Residual Resist Layer Thickness in E-Beam Lithography Based on Energy Dispersive X-Ray Spectrometer
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.505-507.43&Exemplar=1&LAN=DE A1 Lee, Yung Chun A1 Chiu, Cheng Yu A1 Liu, Chuan Pu A1 Hsiao, Fei Bin A1 Chen, Chun Hung PB Trans Tech Publications, Ltd. YR 2006 SN 1662-9752 JF Materials Science Forum VO 505-507 SP 43 OP 48 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.505-507.43 DO https://doi.org/10.4028/www.scientific.net/msf.505-507.43 SF ELIB - SuUB Bremen
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