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1 Ergebnisse
1
Hetero-Epitaxial Growth of 3C-SiC on Silicon Substrates by ..:
Shimizu, Hideki
;
Aoyama, Yosuke
Materials Science Forum. 527-529 (2006) - p. 299-302 , 2006
Link:
https://doi.org/10.4028/www.scientific.net/msf.527-529..
RT Journal T1
Hetero-Epitaxial Growth of 3C-SiC on Silicon Substrates by Plasma Assisted CVD
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.527-529.299&Exemplar=1&LAN=DE A1 Shimizu, Hideki A1 Aoyama, Yosuke PB Trans Tech Publications, Ltd. YR 2006 SN 1662-9752 JF Materials Science Forum VO 527-529 SP 299 OP 302 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.527-529.299 DO https://doi.org/10.4028/www.scientific.net/msf.527-529.299 SF ELIB - SuUB Bremen
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