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Dependence of the Dielectric Properties of Pt/ZrO2/Si Capac..:
Lee, Chong Mu
;
Park, Anna
;
Park, Su Young
.
Materials Science Forum. 544-545 (2007) - p. 937-940 , 2007
Link:
https://doi.org/10.4028/www.scientific.net/msf.544-545..
RT Journal T1
Dependence of the Dielectric Properties of Pt/ZrO2/Si Capacitors Prepared by RF-Magnetron Sputtering on the Oxygen Partial Pressure and the Annealing Temperature
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.544-545.937&Exemplar=1&LAN=DE A1 Lee, Chong Mu A1 Park, Anna A1 Park, Su Young A1 Park, Min Woo PB Trans Tech Publications, Ltd. YR 2007 SN 1662-9752 JF Materials Science Forum VO 544-545 SP 937 OP 940 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.544-545.937 DO https://doi.org/10.4028/www.scientific.net/msf.544-545.937 SF ELIB - SuUB Bremen
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