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1 Ergebnisse
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Preannealing Effect on Mobility of N-/Al-Coimplanted and Ov..:
Nanen, Yuichiro
;
Zippelius, Bernd
;
Beljakowa, Svetlana
...
Materials Science Forum. 645-648 (2010) - p. 487-490 , 2010
Link:
https://doi.org/10.4028/www.scientific.net/msf.645-648..
RT Journal T1
Preannealing Effect on Mobility of N-/Al-Coimplanted and Over-Oxidized 4H-SiC MOSFETs
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.645-648.487&Exemplar=1&LAN=DE A1 Nanen, Yuichiro A1 Zippelius, Bernd A1 Beljakowa, Svetlana A1 Trapaidze, Lia A1 Krieger, M. A1 Kimoto, Tsunenobu A1 Pensl, Gerhard PB Trans Tech Publications, Ltd. YR 2010 SN 1662-9752 JF Materials Science Forum VO 645-648 SP 487 OP 490 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.645-648.487 DO https://doi.org/10.4028/www.scientific.net/msf.645-648.487 SF ELIB - SuUB Bremen
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