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Synthetic Properties of the c-Axis Tilted AlN Thin Films:
Chung, Chung Jen
;
Wei, Ching Liang
;
Hsieh, Po Tsung
...
Materials Science Forum. 654-656 (2010) - p. 1780-1783 , 2010
Link:
https://doi.org/10.4028/www.scientific.net/msf.654-656..
RT Journal T1
Synthetic Properties of the c-Axis Tilted AlN Thin Films
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.654-656.1780&Exemplar=1&LAN=DE A1 Chung, Chung Jen A1 Wei, Ching Liang A1 Hsieh, Po Tsung A1 Huang, Chao Yu A1 Lin, Jen Fin A1 Chen, Ying Chung A1 Cheng, Chien Chuan PB Trans Tech Publications, Ltd. YR 2010 SN 1662-9752 JF Materials Science Forum VO 654-656 SP 1780 OP 1783 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.654-656.1780 DO https://doi.org/10.4028/www.scientific.net/msf.654-656.1780 SF ELIB - SuUB Bremen
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