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1 Ergebnisse
1
Advanced Stress Analysis by Micro-Structures Realization on..:
Anzalone, Ruggero
;
Camarda, Massimo
;
D'Arrigo, Giuseppe
...
Materials Science Forum. 679-680 (2011) - p. 133-136 , 2011
Link:
https://doi.org/10.4028/www.scientific.net/msf.679-680..
RT Journal T1
Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.679-680.133&Exemplar=1&LAN=DE A1 Anzalone, Ruggero A1 Camarda, Massimo A1 D'Arrigo, Giuseppe A1 Locke, Christopher A1 Canino, Andrea A1 Piluso, Nicolò A1 Severino, Andrea A1 La Magna, Antonino A1 Saddow, Stephen E. A1 La Via, Francesco PB Trans Tech Publications, Ltd. YR 2011 SN 1662-9752 JF Materials Science Forum VO 679-680 SP 133 OP 136 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.679-680.133 DO https://doi.org/10.4028/www.scientific.net/msf.679-680.133 SF ELIB - SuUB Bremen
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