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1 Ergebnisse
1
Development of Vertical 3×2〞LPCVD System for Fast Epitaxial..:
Zhao, Wan Shun
;
Sun, Guo Sheng
;
Wu, Hai Lei
...
Materials Science Forum. 717-720 (2012) - p. 105-108 , 2012
Link:
https://doi.org/10.4028/www.scientific.net/msf.717-720..
RT Journal T1
Development of Vertical 3×2〞LPCVD System for Fast Epitaxial Growth on 4H-SiC
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.717-720.105&Exemplar=1&LAN=DE A1 Zhao, Wan Shun A1 Sun, Guo Sheng A1 Wu, Hai Lei A1 Yan, Guo Guo A1 Zheng, Liu A1 Dong, Lin A1 Wang, Lei A1 Liu, Xing Fang A1 Yang, Li Jun PB Trans Tech Publications, Ltd. YR 2012 SN 1662-9752 JF Materials Science Forum VO 717-720 SP 105 OP 108 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.717-720.105 DO https://doi.org/10.4028/www.scientific.net/msf.717-720.105 SF ELIB - SuUB Bremen
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