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1 Ergebnisse
1
Study on Reactive Species in Catalyst-Referred Etching of 4..:
Isohashi, Ai
;
Sano, Yasushi
;
Okamoto, Takeshi
...
Materials Science Forum. 740-742 (2013) - p. 847-850 , 2013
Link:
https://doi.org/10.4028/www.scientific.net/msf.740-742..
RT Journal T1
Study on Reactive Species in Catalyst-Referred Etching of 4H–SiC using Platinum and Hydrofluoric Acid
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.740-742.847&Exemplar=1&LAN=DE A1 Isohashi, Ai A1 Sano, Yasushi A1 Okamoto, Takeshi A1 Tachibana, Kazuma A1 Arima, Kenta A1 Inagaki, Kouji A1 Yagi, Keita A1 Sadakuni, Shun A1 Morikawa, Yoshitada A1 Yamauchi, Kazuto PB Trans Tech Publications, Ltd. YR 2013 SN 1662-9752 JF Materials Science Forum VO 740-742 SP 847 OP 850 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.740-742.847 DO https://doi.org/10.4028/www.scientific.net/msf.740-742.847 SF ELIB - SuUB Bremen
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