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1 Ergebnisse
1
Low Cost Ion Implantation Process with High Heat Resistant ..:
Fujiwara, Takenori
;
Tanigaki, Yugo
;
Furukawa, Yukihiro
...
Materials Science Forum. 778-780 (2014) - p. 677-680 , 2014
Link:
https://doi.org/10.4028/www.scientific.net/msf.778-780..
RT Journal T1
Low Cost Ion Implantation Process with High Heat Resistant Photoresist in Silicon Carbide Device Fabrication
UL https://suche.suub.uni-bremen.de/peid=cr-10.4028_www.scientific.net_msf.778-780.677&Exemplar=1&LAN=DE A1 Fujiwara, Takenori A1 Tanigaki, Yugo A1 Furukawa, Yukihiro A1 Tonari, Kazuhiro A1 Otsuki, Akihiro A1 Imai, Tomohiro A1 Oose, Naoyuki A1 Utsumi, Makoto A1 Ryo, Mina A1 Gotoh, Masahide A1 Nakamata, Shinichi A1 Sakai, Takao A1 Sakai, Yoshiyuki A1 Miyajima, Masaaki A1 Kumura, Hiroshi A1 Fukuda, Kenji A1 Okumura, Hajime PB Trans Tech Publications, Ltd. YR 2014 SN 1662-9752 JF Materials Science Forum VO 778-780 SP 677 OP 680 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/msf.778-780.677 DO https://doi.org/10.4028/www.scientific.net/msf.778-780.677 SF ELIB - SuUB Bremen
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