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1 Ergebnisse
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Quartz Crystal Microbalances for Evaluating Gas Motion Diff..:
Otani, Mana
;
Takahashi, Toshinori
;
Habuka, Hitoshi
...
Advances in Chemical Engineering and Science. 10 (2020) 3 - p. 190-200 , 2020
Link:
https://doi.org/10.4236/aces.2020.103014
RT Journal T1
Quartz Crystal Microbalances for Evaluating Gas Motion Differences between Dichlorosilane and Trichlorosilane in Ambient Hydrogen in a Slim Vertical Cold Wall Chemical Vapor Deposition Reactor
UL https://suche.suub.uni-bremen.de/peid=cr-10.4236_aces.2020.103014&Exemplar=1&LAN=DE A1 Otani, Mana A1 Takahashi, Toshinori A1 Habuka, Hitoshi A1 Ishida, Yuuki A1 Ikeda, Shin-Ichi A1 Hara, Shiro PB Scientific Research Publishing, Inc. YR 2020 SN 2160-0392 SN 2160-0406 JF Advances in Chemical Engineering and Science VO 10 IS 3 SP 190 OP 200 LK http://dx.doi.org/https://doi.org/10.4236/aces.2020.103014 DO https://doi.org/10.4236/aces.2020.103014 SF ELIB - SuUB Bremen
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