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1 Ergebnisse
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Low-Residual-Stress Amorphous Film for LiTaO3/Quartz or LiN..:
Tezuka, Ami
;
Kuwae, Hiroyuki
;
Yamada, Kosuke
...
Transactions of The Japan Institute of Electronics Packaging. 13 (2020) 0 - p. E19-009-1-E19-009-7 , 2020
Link:
https://doi.org/10.5104/jiepeng.13.e19-009-1
RT Journal T1 <Title>Low-Residual-Stress Amorphous Film for LiTaO3/Quartz or LiNbO3/Quartz Bonding toward 5G Surface Acoustic Wave Devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.5104_jiepeng.13.e19-009-1&Exemplar=1&LAN=DE A1 Tezuka, Ami A1 Kuwae, Hiroyuki A1 Yamada, Kosuke A1 Shoji, Shuichi A1 Kakio, Shoji A1 Mizuno, Jun PB Japan Institute of Electronics Packaging YR 2020 SN 1883-3365 SN 1884-8028 JF Transactions of The Japan Institute of Electronics Packaging VO 13 IS 0 SP E19 OP 009-1-E19-009-7 LK http://dx.doi.org/https://doi.org/10.5104/jiepeng.13.e19-009-1 DO https://doi.org/10.5104/jiepeng.13.e19-009-1 SF ELIB - SuUB Bremen
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