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1 Ergebnisse
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Study of the effect of experimental conditions on atomic la..:
Sun, Yuandong
;
Ni, Peijun
;
Zhang, Lijun
...
Highlights in Science, Engineering and Technology. 55 (2023) - p. 122-127 , 2023
Link:
https://doi.org/10.54097/hset.v55i.9928
RT Journal T1 <Title>Study of the effect of experimental conditions on atomic layer deposition of aluminum nitride films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.54097_hset.v55i.9928&Exemplar=1&LAN=DE A1 Sun, Yuandong A1 Ni, Peijun A1 Zhang, Lijun A1 Kang, Jingjie A1 Wang, Ruolan A1 Zhao, Tianhao PB Darcy & Roy Press Co. Ltd. YR 2023 SN 2791-0210 JF Highlights in Science, Engineering and Technology VO 55 SP 122 OP 127 LK http://dx.doi.org/https://doi.org/10.54097/hset.v55i.9928 DO https://doi.org/10.54097/hset.v55i.9928 SF ELIB - SuUB Bremen
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