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1 Ergebnisse
1
Cyber-Physical Systems Framework for Predictive Metrology i..:
Lee, Jay
;
Dong, Huwei
;
Ji, Dai-Yan
.
International Journal of Precision Engineering and Manufacturing-Smart Technology. 1 (2023) 1 - p. 107-113 , 2023
Link:
https://doi.org/10.57062/ijpem-st.2022.0010
RT Journal T1 <Title>Cyber-Physical Systems Framework for Predictive Metrology in Semiconductor Manufacturing Process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.57062_ijpem-st.2022.0010&Exemplar=1&LAN=DE A1 Lee, Jay A1 Dong, Huwei A1 Ji, Dai-Yan A1 Kundu, Pradeep PB International Journal of Precision Engineering and Manufacturing-Smart Technology of Korean Society for Precision Engineering YR 2023 SN 2951-4614 SN 2951-6382 JF International Journal of Precision Engineering and Manufacturing-Smart Technology VO 1 IS 1 SP 107 OP 113 LK http://dx.doi.org/https://doi.org/10.57062/ijpem-st.2022.0010 DO https://doi.org/10.57062/ijpem-st.2022.0010 SF ELIB - SuUB Bremen
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