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1 Ergebnisse
1
3-D Numerical Simulation and Optical Diagnosis of Temperatu..:
Choi, Daeun
;
Lee, Yong Hee
;
Kim, Kwang Ho
.
Applied Science and Convergence Technology. 32 (2023) 1 - p. 7-11 , 2023
Link:
https://doi.org/10.5757/asct.2023.32.1.7
RT Journal T1 <Title>3-D Numerical Simulation and Optical Diagnosis of Temperature Distribution Inside a Chamber of Hot Filament Chemical Vapor Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.5757_asct.2023.32.1.7&Exemplar=1&LAN=DE A1 Choi, Daeun A1 Lee, Yong Hee A1 Kim, Kwang Ho A1 Choi, Sooseok PB The Korean Vacuum Society YR 2023 SN 2288-6559 JF Applied Science and Convergence Technology VO 32 IS 1 SP 7 OP 11 LK http://dx.doi.org/https://doi.org/10.5757/asct.2023.32.1.7 DO https://doi.org/10.5757/asct.2023.32.1.7 SF ELIB - SuUB Bremen
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