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1 Ergebnisse
1
Machine Learning-Based Prediction of Atomic Layer Control f..:
Kim, Changmin
;
Lee, Seunghwan
;
Kim, Muyoung
...
Applied Science and Convergence Technology. 32 (2023) 5 - p. 106-109 , 2023
Link:
https://doi.org/10.5757/asct.2023.32.5.106
RT Journal T1 <Title>Machine Learning-Based Prediction of Atomic Layer Control for MoS2 via Reactive Ion Etcher</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.5757_asct.2023.32.5.106&Exemplar=1&LAN=DE A1 Kim, Changmin A1 Lee, Seunghwan A1 Kim, Muyoung A1 Choi, Min Sup A1 Kim, Taesung A1 Kim, Hyeong-U PB The Korean Vacuum Society YR 2023 SN 2288-6559 JF Applied Science and Convergence Technology VO 32 IS 5 SP 106 OP 109 LK http://dx.doi.org/https://doi.org/10.5757/asct.2023.32.5.106 DO https://doi.org/10.5757/asct.2023.32.5.106 SF ELIB - SuUB Bremen
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