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1 Ergebnisse
1
Etch Damage of SiOC Thin Films in an Inductively Coupled Pl..:
Kim, Jinhyuk
;
Choi, Gilyoung
;
Lee, Daekug
Applied Science and Convergence Technology. 33 (2024) 1 - p. 27-31 , 2024
Link:
https://doi.org/10.5757/asct.2024.33.1.27
RT Journal T1 <Title>Etch Damage of SiOC Thin Films in an Inductively Coupled Plasma Using Low-Frequency</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.5757_asct.2024.33.1.27&Exemplar=1&LAN=DE A1 Kim, Jinhyuk A1 Choi, Gilyoung A1 Lee, Daekug PB The Korean Vacuum Society YR 2024 SN 2288-6559 JF Applied Science and Convergence Technology VO 33 IS 1 SP 27 OP 31 LK http://dx.doi.org/https://doi.org/10.5757/asct.2024.33.1.27 DO https://doi.org/10.5757/asct.2024.33.1.27 SF ELIB - SuUB Bremen
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