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1 Ergebnisse
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Thickness dependence of the passivation quality of Cat-CVD ..:
Yuli, Wen
;
Ohdaira, Keisuke
Japanese Journal of Applied Physics. 59 (2019) SC - p. SCCB07 , 2019
Link:
https://doi.org/10.7567/1347-4065/ab4aa3
RT Journal T1 <Title>Thickness dependence of the passivation quality of Cat-CVD SiN xfilms</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_1347-4065_ab4aa3&Exemplar=1&LAN=DE A1 Yuli, Wen A1 Ohdaira, Keisuke PB IOP Publishing YR 2019 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 59 IS SC SP SCCB07 LK http://dx.doi.org/https://doi.org/10.7567/1347-4065/ab4aa3 DO https://doi.org/10.7567/1347-4065/ab4aa3 SF ELIB - SuUB Bremen
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