I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Current status and nature of high-frequency electronegative..:
Makabe, Toshiaki
Japanese Journal of Applied Physics. 58 (2019) 11 - p. 110101 , 2019
Link:
https://doi.org/10.7567/1347-4065/ab4d23
RT Journal T1 <Title>Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_1347-4065_ab4d23&Exemplar=1&LAN=DE A1 Makabe, Toshiaki PB IOP Publishing YR 2019 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 58 IS 11 SP 110101 LK http://dx.doi.org/https://doi.org/10.7567/1347-4065/ab4d23 DO https://doi.org/10.7567/1347-4065/ab4d23 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
