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1 Ergebnisse
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Distributions of hafnia and titania cores in EUV metal resi..:
Toriumi, Minoru
;
Sato, Yuta
;
Koshino, Masanori
..
Applied Physics Express. 9 (2016) 11 - p. 111801 , 2016
Link:
https://doi.org/10.7567/apex.9.111801
RT Journal T1
Distributions of hafnia and titania cores in EUV metal resists evaluated by scanning transmission electron microscopy and electron energy loss spectroscopy
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_apex.9.111801&Exemplar=1&LAN=DE A1 Toriumi, Minoru A1 Sato, Yuta A1 Koshino, Masanori A1 Suenaga, Kazu A1 Itani, Toshiro PB IOP Publishing YR 2016 SN 1882-0778 SN 1882-0786 JF Applied Physics Express VO 9 IS 11 SP 111801 LK http://dx.doi.org/https://doi.org/10.7567/apex.9.111801 DO https://doi.org/10.7567/apex.9.111801 SF ELIB - SuUB Bremen
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