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1 Ergebnisse
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Low-Temperature Solid Phase Epitaxial Regrowth of Silicon f..:
Lee, Kong-Soo
;
Yeo, Chadong
;
Yoo, Dae-Han
...
Japanese Journal of Applied Physics. 50 (2011) 1S1 - p. 01AB06 , 2011
Link:
https://doi.org/10.7567/jjap.50.01ab06
RT Journal T1 <Title>Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.50.01ab06&Exemplar=1&LAN=DE A1 Lee, Kong-Soo A1 Yeo, Chadong A1 Yoo, Dae-Han A1 Kim, Seok-Sik A1 Moon, Joo-Tae A1 Jung, Soon-Moon A1 Son, Yong-Hoon A1 Park, Hyunho A1 Jeong, Hanwook A1 Kim, Kwang-Ryul A1 Choi, Byoungdeog PB IOP Publishing YR 2011 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 50 IS 1S1 SP 01AB06 LK http://dx.doi.org/https://doi.org/10.7567/jjap.50.01ab06 DO https://doi.org/10.7567/jjap.50.01ab06 SF ELIB - SuUB Bremen
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