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1 Ergebnisse
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Metal-Assisted Chemical Etching Using Silica Nanoparticle f..:
Kato, Shinya
;
Watanabe, Yuya
;
Kurokawa, Yasuyoshi
...
Japanese Journal of Applied Physics. 51 (2012) 2S - p. 02BP09 , 2012
Link:
https://doi.org/10.7567/jjap.51.02bp09
RT Journal T1 <Title>Metal-Assisted Chemical Etching Using Silica Nanoparticle for the Fabrication of a Silicon Nanowire Array</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.51.02bp09&Exemplar=1&LAN=DE A1 Kato, Shinya A1 Watanabe, Yuya A1 Kurokawa, Yasuyoshi A1 Yamada, Akira A1 Ohta, Yoshimi A1 Niwa, Yusuke A1 Hirota, Masaki PB IOP Publishing YR 2012 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 51 IS 2S SP 02BP09 LK http://dx.doi.org/https://doi.org/10.7567/jjap.51.02bp09 DO https://doi.org/10.7567/jjap.51.02bp09 SF ELIB - SuUB Bremen
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