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1 Ergebnisse
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Study on Ozonated Solution Oxidation of Phosphorus Doped Hy..:
Asanuma, Haruhiko
;
Suzuki, Takaaki
;
Kusunoki, Toshiaki
Japanese Journal of Applied Physics. 51 (2012) 6R - p. 066503 , 2012
Link:
https://doi.org/10.7567/jjap.51.066503
RT Journal T1
Study on Ozonated Solution Oxidation of Phosphorus Doped Hydrogenated Amorphous Silicon Surface for Cu–Mn Alloy Based Electrodes in Thin Film Transistor
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.51.066503&Exemplar=1&LAN=DE A1 Asanuma, Haruhiko A1 Suzuki, Takaaki A1 Kusunoki, Toshiaki PB IOP Publishing YR 2012 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 51 IS 6R SP 066503 LK http://dx.doi.org/https://doi.org/10.7567/jjap.51.066503 DO https://doi.org/10.7567/jjap.51.066503 SF ELIB - SuUB Bremen
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