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1 Ergebnisse
1
Study of Development Processes for ZEP-520 as a High-Resolu..:
Mohammad, Mohammad Ali
;
Koshelev, Kirill
;
Fito, Taras
...
Japanese Journal of Applied Physics. 51 (2012) 6S - p. 06FC05 , 2012
Link:
https://doi.org/10.7567/jjap.51.06fc05
RT Journal T1
Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.51.06fc05&Exemplar=1&LAN=DE A1 Mohammad, Mohammad Ali A1 Koshelev, Kirill A1 Fito, Taras A1 Zheng, David Ai Zhi A1 Stepanova, Maria A1 Dew, Steven PB IOP Publishing YR 2012 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 51 IS 6S SP 06FC05 LK http://dx.doi.org/https://doi.org/10.7567/jjap.51.06fc05 DO https://doi.org/10.7567/jjap.51.06fc05 SF ELIB - SuUB Bremen
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