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1 Ergebnisse
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SiGe Synthesis by Ge Ion Implantation:
Yuk, Hyung-Sang
;
Oh, Jin-Heon
;
Lim, Kee-Joe
Japanese Journal of Applied Physics. 51 (2012) 9S2 - p. 09MF03 , 2012
Link:
https://doi.org/10.7567/jjap.51.09mf03
RT Journal T1 <Title>SiGe Synthesis by Ge Ion Implantation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.51.09mf03&Exemplar=1&LAN=DE A1 Yuk, Hyung-Sang A1 Oh, Jin-Heon A1 Lim, Kee-Joe PB IOP Publishing YR 2012 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 51 IS 9S2 SP 09MF03 LK http://dx.doi.org/https://doi.org/10.7567/jjap.51.09mf03 DO https://doi.org/10.7567/jjap.51.09mf03 SF ELIB - SuUB Bremen
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