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1 Ergebnisse
1
Vacancy-Type Defects Introduced by Gas Cluster Ion-Implanta..:
Uedono, Akira
;
Moriya, Tsuyoshi
;
Tsutsui, Takuro
...
Japanese Journal of Applied Physics. 51 (2012) 11R - p. 111801 , 2012
Link:
https://doi.org/10.7567/jjap.51.111801
RT Journal T1
Vacancy-Type Defects Introduced by Gas Cluster Ion-Implantation on Si Studied by Monoenergetic Positron Beams
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.51.111801&Exemplar=1&LAN=DE A1 Uedono, Akira A1 Moriya, Tsuyoshi A1 Tsutsui, Takuro A1 Kimura, Shogo A1 Oshima, Nagayasu A1 Suzuki, Ryoichi A1 Ishibashi, Shoji A1 Matsui, Hidefumi A1 Narushima, Masaki A1 Ishikawa, Yoichi A1 Graf, Michael A1 Yamashita, Koji PB IOP Publishing YR 2012 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 51 IS 11R SP 111801 LK http://dx.doi.org/https://doi.org/10.7567/jjap.51.111801 DO https://doi.org/10.7567/jjap.51.111801 SF ELIB - SuUB Bremen
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