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1 Ergebnisse
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Effect of Pad Surface Micro-Texture on Removal Rate during ..:
Liao, Xiaoyan
;
Zhuang, Yun
;
Borucki, Leonard J.
...
Japanese Journal of Applied Physics. 52 (2012) 1R - p. 018001 , 2012
Link:
https://doi.org/10.7567/jjap.52.018001
RT Journal T1
Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.52.018001&Exemplar=1&LAN=DE A1 Liao, Xiaoyan A1 Zhuang, Yun A1 Borucki, Leonard J. A1 Cheng, Jiang A1 Theng, Siannie A1 Ashizawa, Toranosuke A1 Philipossian, Ara PB IOP Publishing YR 2012 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 52 IS 1R SP 018001 LK http://dx.doi.org/https://doi.org/10.7567/jjap.52.018001 DO https://doi.org/10.7567/jjap.52.018001 SF ELIB - SuUB Bremen
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