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1 Ergebnisse
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Reliability Evaluation of Al2O3 Deposited by Ozone-Based At..:
Kikuta, Daigo
;
Narita, Tetsuo
;
Kutsuki, Katsuhiro
..
Japanese Journal of Applied Physics. 52 (2013) 8S - p. 08JN19 , 2013
Link:
https://doi.org/10.7567/jjap.52.08jn19
RT Journal T1
Reliability Evaluation of Al2O3 Deposited by Ozone-Based Atomic Layer Deposition on Dry-Etched n-Type GaN
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.52.08jn19&Exemplar=1&LAN=DE A1 Kikuta, Daigo A1 Narita, Tetsuo A1 Kutsuki, Katsuhiro A1 Uesugi, Tsutomu A1 Kachi, Tetsu PB IOP Publishing YR 2013 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 52 IS 8S SP 08JN19 LK http://dx.doi.org/https://doi.org/10.7567/jjap.52.08jn19 DO https://doi.org/10.7567/jjap.52.08jn19 SF ELIB - SuUB Bremen
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