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1 Ergebnisse
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Reduction of surface roughness and defect density by cryoge..:
Murakoshi, Atsushi
;
Iwase, Masao
;
Niiyama, Hiromi
..
Japanese Journal of Applied Physics. 53 (2014) 6 - p. 066507 , 2014
Link:
https://doi.org/10.7567/jjap.53.066507
RT Journal T1
Reduction of surface roughness and defect density by cryogenic implantation of arsenic
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.53.066507&Exemplar=1&LAN=DE A1 Murakoshi, Atsushi A1 Iwase, Masao A1 Niiyama, Hiromi A1 Koike, Mitsuo A1 Suguro, Kyoichi PB IOP Publishing YR 2014 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 53 IS 6 SP 066507 LK http://dx.doi.org/https://doi.org/10.7567/jjap.53.066507 DO https://doi.org/10.7567/jjap.53.066507 SF ELIB - SuUB Bremen
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