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1 Ergebnisse
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Numerical simulation of plasma confinement in DC magnetron ..:
Kageyama, Junichi
;
Yoshimoto, Mamoru
;
Matsuda, Akifumi
..
Japanese Journal of Applied Physics. 53 (2014) 8 - p. 088001 , 2014
Link:
https://doi.org/10.7567/jjap.53.088001
RT Journal T1
Numerical simulation of plasma confinement in DC magnetron sputtering under different magnetic fields and anode structures
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.53.088001&Exemplar=1&LAN=DE A1 Kageyama, Junichi A1 Yoshimoto, Mamoru A1 Matsuda, Akifumi A1 Akao, Yasuhiko A1 Shidoji, Eiji PB IOP Publishing YR 2014 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 53 IS 8 SP 088001 LK http://dx.doi.org/https://doi.org/10.7567/jjap.53.088001 DO https://doi.org/10.7567/jjap.53.088001 SF ELIB - SuUB Bremen
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