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1 Ergebnisse
1
Numerically controlled atmospheric-pressure plasma sacrific..:
Takei, Hiroyasu
;
Yoshinaga, Keinosuke
;
Matsuyama, Satoshi
..
Japanese Journal of Applied Physics. 54 (2014) 1S - p. 01AE03 , 2014
Link:
https://doi.org/10.7567/jjap.54.01ae03
RT Journal T1
Numerically controlled atmospheric-pressure plasma sacrificial oxidation using electrode arrays for improving silicon-on-insulator layer uniformity
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.54.01ae03&Exemplar=1&LAN=DE A1 Takei, Hiroyasu A1 Yoshinaga, Keinosuke A1 Matsuyama, Satoshi A1 Yamauchi, Kazuto A1 Sano, Yasuhisa PB IOP Publishing YR 2014 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 54 IS 1S SP 01AE03 LK http://dx.doi.org/https://doi.org/10.7567/jjap.54.01ae03 DO https://doi.org/10.7567/jjap.54.01ae03 SF ELIB - SuUB Bremen
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